The following documents contain operational and facilities specifications for the designated model stepper. These specifications were derived from the maintenance manual for each model. Please check with the OEM for the most current published specifications.
Model 990 - 1000 Widefield
Model 1100 Widefield
Model 4035 Bigfield
Model 1500 Bigfield
Model 1600 DSA Bigfield
Model 1700 Bigfield
Model 2244i SuperBigfield
Model 4700 SuperBigfield
The following documents are for reticles manufactured by Stepper Equipment Inc.
SDTR1.0A SEI Diagnostic Test Reticle, 3 field
VTLSR Visual Test Light Scattering Reticle
VTGR Visual Test Gamma Reticle
VBSTR Visual Blindstep Reticle
The following documents are OEM manuals for products sold by Stepper Equipment.